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Chip-sensor based Mass Flow Meters/Controllers for gases


Equipment manufacturers are looking for compact solutions to monitor or control the gas flow or pressure in their system. Previously, conventional mass flow and pressure meters and controllers have needed a footprint of 1.5", as for instance specified in the NeSSITM system. Now, and in close co-operation with TNO-TPD (leading Dutch institute for applied physics) Bronkhorst has developed the IQ+FLOW® mass flow sensor. Due to the use of micro solid state technology (MEMS), Bronkhorst has been able to halve the footprint dimension to 0.75", thereby realizing the ultra compact flow and pressure controllers.

High intrinsic quality, featuring...

  • Flow ranges from 0,2...10 mln/min up to 0,1...5 ln/min (Full Scale values)
  • Very stable Zero, due to the thermally balanced chip-sensor
  • Compact assembly ensures space efficiency
  • Economical solution, low cost of ownership
  • Fast response, down to 300 msec
  • Analog and digital (RS232 / RS485) communication

Customer specific designs

Based on the micro system technology of IQ+FLOW® series, Bronkhorst also offers the possibility to combine functional modules on a compact manifold. See IQ+FLOW manifold solutions

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  • Applications
  • Capacities
  • Documentation

Analytical applications

Examples of analytical applications based on the ultra compact modules with a footprint of 0.75" are:

  • Flow - Pressure control at the injector side of a GC
  • Flow control at the detector side of a GC or HPLC
  • Flow control in an FID detector

Flow capacities (based on Air)

Mass Flow Meter (MFM)


Series IQF-100C min. 0,2 ... 10 mln/min
max. 0,1 ... 5 ln/min
Series IQFD-100C
min. 0,2 ... 10 mln/min
max. 0,1 ... 5 ln/min

Mass Flow Controller (MFC)


Series IQF-200C min. 0,2 ... 10 mln/min
max. 0,1 ... 5 ln/min
Series IQFD-200C
min. 0,2 ... 10 mln/min
max. 0,1 ... 5 ln/min


For more information see leaflet "IQ+FLOW Micro Solid State Controllers"

Miniatuur Mass Flow Controller Top mount MFC
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