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EL-FLOW® Metal Sealed
Gas Mass Flow Meters / Controllers

General

Metal Seal Gas Mass Flow Meters and Controllers of Bronkhorst are characterised by their unique, patented metal-to-metal seal construction with excellent resealing capability. Furthermore they distinguish themselves by a high surface quality and are therefore especially suitable for meeting the semiconductor industry requirements as well as other high purity gas applications. The base blocks of the Mass Flow Meters and Controllers have 1/4" face seal male (VCR) connections.

lowest range 0,12...6 mln/min
highest range 1... 50 ln/min

Todays instruments are equipped with a digital pc-board, offering high-accuracy, excellent temperature stability and fast response (settling time t98 down to 500 msec). The latest EL-FLOW® design features Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency. For the convenience of the customer Bronkhorst provides easy to use configuration software.

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  • Features
  • Capacities
  • Documentation

Features

  • High accuracy (standard ±0,5% RD plus ±0,1% FS)
  • Resealable metal-to-metal outer seal construction (no rings)
  • Electropolished wetted parts
  • Cleanroom assembled
  • Multi Gas / Multi Range functionality
  • Analog and digital I/O, with optionally integrated interface to
    DeviceNet™, PROFIBUS DP, PROFINET, Modbus RTU/ASCII, EtherCAT or FLOW-BUS
  • Super stable zero (no need for auto-zero circuit)

Flow capacities (based on air)

Mass Flow Meter (MFM)

Ranges

Model F-111CM min. 0,12 ... 6 mln/min
max. 1 ... 50 ln/min

Mass Flow Controller (MFC)

Ranges

Model F-201CM min. 0,12 ... 6 mln/min
max. 1 ... 50 ln/min

Mass Flow Controller F-201CM - metaal afgedichtMetaalafgedichte mass flow meter model F-111CM
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